[1] RetolazaA,JuarrosA,RamiroJ,etal.Thermalrolltorollnanoimprintlithographyformicropillarsfabricationonthermoplastics[J].MicroelectronicEngineering,2018,193:54- 61. [2] HutflesJ,ChapmanW,PellegrinoJ.Roll-to-rollnanoimprintlithography of ultrafiltration membrane [J].JournalofAppliedPolymerScience,2018,135 (11):459- 493.
[3] Lee H.Effectofimprintingpressureonresiduallayer thicknessinultravioletnanoimprintlithography[J].JournalofVacuumScience& TechnologyB:Microelectronics andNanometerStructuresProcessing,Measurement,and Phenomena,2005,23(3):
1102- 1106.
[4] YoonH,LeeH,LeeWB.Towardresidual layer free nanoimprintlithographyinlarge areafabrication[J].Korea AustraliaRheologyJournal,
2014,26(1):39- 48.
[5] 叶回春,沈连?,李木军.滚动压印装置研制与压印填充模拟[J].纳米技术与精密工程,2014,12(4):281-
285.
[6] ZhangR,WangQ,ZhengX,etal.Effectsoffriction coefficientandcohesionbetweenamoldandapolymer resistduringdemoldingprocessinhotembossing[J]. Journal of Photopolymer Science and Technology, 2016,29(1):39- 44.