[1]高甜甜,聂伟荣,王 鹤.扭结型微电热驱动器多物理场耦合建模与性能分析[J].机械与电子,2025,(01):74-80.
　GAO Tiantian,NIE Weirong,WANG He.Multi physics Field Coupling Modeling and Performance Analysis of Kinked Electrothermal Actuator[J].Machinery & Electronics,2025,(01):74-80.
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扭结型微电热驱动器多物理场耦合建模与性能分析()
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《机械与电子》[ISSN:1001-2257/CN:52-1052/TH]

卷:
期数:
2025年01期
页码:
74-80
栏目:
机电一体化
出版日期:
2025-01-30

文章信息/Info

Title:
Multi physics Field Coupling Modeling and Performance Analysis of Kinked Electrothermal Actuator
文章编号:
1001-2257 ( 2025 ) 01-0074-07
作者:
高甜甜; 聂伟荣; 王 鹤
南京理工大学机械工程学院,江苏 南京 210094
Author(s):
GAO Tiantian ;  NIE Weirong ;  WANG He
( School of Mechanical Engineering , Nanjing University of Science and Technology , Nanjing 210094 , China )
关键词:
扭结型电热驱动器; 电-热耦合模型; 热 力耦合模型; 稳态位移
Keywords:
kinked electrothermal actuators ;  electro thermal coupling model ;  thermal-force coupling model ;  steady state displacement
分类号:
TH-39
文献标志码:
A
摘要:
针对 MEMS 扭结型微电热驱动器缺乏理论研究问题,进行了多物理场耦合建模与性能分析。通过能量守恒定律和傅里叶导热定律建立了扭结型电热驱动器的电 热耦合模型和热 力耦合模型,获得了驱动器在恒定电压下的温度分布和稳态位移表达式;通过有限元仿真对理论模型进行了验证。在相同的温度下,理论位移与仿真位移之间的最大误差值为 7 μ m ,最大相对误差为 6.25% ,具有较高的一致性。此外,结合有限元仿真进一步分析了驱动器的结构参数对位移输出特性的影响。结果表明,当中间扭结斜梁长度与直梁长度的比例为 7% 、倾斜角度为 7° 时,在驱动器不产生屈曲失效的前提下其输出位移最大,这对提高驱动器工作稳定性以及输出性能具有重要指导意义。
Abstract:
Aiming at the lack of theoretical research on kinked electrothermal actuators , its multi physical field coupling modeling and performance analysis are carried out.The electric-thermal coupling model and thermal-mechanical coupling model of the kinked electrothermal actuators are established by the law of energy conservation and the Fourier ’ s law of thermal conductivity , and the temperature distribution and steady-state displacement expressions of the actuator under constant voltage are obtained.The theoretical model is verified by finite element simulation.At the same temperature , the maximum error value between the theoretical displacement and the simulated displacement is 7 μ m , and the maximum relative error is 6.25% , which shows a high consistency.In addition , the effects of the structural parameters of the actuator on the displacement output characteristics are further analyzed in accordance with finite element simulation.The results show that when the ratio of the length of the intermediate kinked diagonal beam to the length of the straight beam is 7% and the tilt angle is 7° , the output displacement is maximized under the actuator without buckling failure , which provides an important guidance for improving the performance of the actuator.

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备注/Memo

备注/Memo:
收稿日期: 2024-05-16
作者简介:高甜甜 ( 1999- ),女,河南驻马店人,硕士研究生,研究方向为机电一体化技术;聂伟荣 ( 1969- ),女,山西原平人,教授,研究方向为微机电系统设计、微小型引信安全系统等,通信作者。
更新日期/Last Update: 2025-03-07