[1]刘 鹏,罗福源,孙凌云.硅锭电火花线切割对称式张力控制研究[J].机械与电子,2021,(04):53-58.
　LIU Peng,LUO Fuyuan,SUN Lingyun.Research on Symmetrical Tension Control of Silicon Ingot Wire EDM[J].Machinery & Electronics,2021,(04):53-58.
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硅锭电火花线切割对称式张力控制研究()
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机械与电子[ISSN:1001-2257/CN:52-1052/TH]

卷:
期数:
2021年04期
页码:
53-58
栏目:
自动控制与检测
出版日期:
2021-04-24

文章信息/Info

Title:
Research on Symmetrical Tension Control of Silicon Ingot Wire EDM
文章编号:
1001-2257（2021）04- 0053-06
作者:
刘 鹏; 罗福源; 孙凌云
南京航空航天大学机电学院,江苏 南京 210016
Author(s):
LIU Peng; LUO Fuyuan; SUN Lingyun
College of Mechanic and Electronic Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China
关键词:
张力波动; 双边张力控制; 分时切换; PID控制
Keywords:
tension fluctuation;  bilateral tension control;  time-sharing switch;  PID
分类号:
TG661
文献标志码:
A
摘要:
针对半导体材料电火花加工过程中加工区域电极丝张力波动的现象，从数学模型的角度指出了传统的非对称式单边张力控制策略的不足，提出了一种新型的对称式双边张力控制方案，并给出基于此方案进行“分时切换控制”的具体实施流程，建立了张力控制系统数学模型，采用PID控制方法对对称式双边张力控制系统进行仿真。仿真结果表明，此控制方案在分时切换瞬间可以在30 ms内完成对目标值的快速追踪，并且超调量控制在5%以内。进行了恒张力控制对比实验，实验结果表明，此方案所得的张力波动率仅为非对称式单边控制方案的50%，改善了加工区域的张力波动情况，解决了因走丝方向不同导致的加工区域张力不一致的问题。
Abstract:
Aiming at the phenomenon of wire tension fluctuations in the machining area during the EDM of semiconductor materials, the shortcomings of the traditional asymmetric unilateral tension control strategy are pointed out from the perspective of the mathematical model, and a new symmetric bilateral tension control scheme is proposed . The specific implementation process of "time-sharing switching control" based on this scheme is given; the mathematical model of tension control system is established, and the PID control method is used to simulate the symmetrical bilateral tension control system. The simulation results show that this control scheme can quickly track the target value within 30 ms at the moment of time-sharing switching, and the overshoot is controlled within 5%. A constant tension control comparison experiment was carried out. The experimental results show that the tension fluctuation rate obtained by this scheme is only 50% of the asymmetric unilateral control scheme, which greatly improves the tension fluctuation in the processing area and solves the problem of inconsistent tension in the processing area caused by the different threading directions.

参考文献/References:

[1].HAHN P O. The 300 mm silicon wafer—a cost and technology challenge[J].Microelectronic engineering,2001,56(1 /2):3-13.
[2].韩其锋,吴明明.大直径太阳能硅片高效低损耗线切割技术研究[J].机电产品开发与创新，2012，25(6):171-173.
[3].PUNTURAT J, TANGWARODOMNUKUN V, DUMKUM C.Surface characteristics and damage of monocrystalline silicon induced by wire-EDM[J]. Applied surface science,2014, 320: 83-92
[4].范圣耀. 高速走丝多次线切割电极丝动态特性及行为稳定技术研究[D].无锡：江南大学，2009.
[5].丁成才,黄晓华,邱明波,等.往复走丝电火花线切割机床电极丝恒张力装置性能研究[J].电加工与模具,2018(1):20-24.
[6].蒋近,戴瑜兴,彭思齐.多线切割机控制系统的研制[J].中国机械工程,2010,21(15):1780-1784.
[7].张义兵,戴瑜兴,袁巨龙, 等. 多线切割机线张力控制系统设计实现 [J]. 机械工程学报, 2009, 45(5): 295-300.
[8].SAHA P ,TARAFDAR D ,PAL S K ，et al.Multi-objective optimization in wire electrical discharge machining of TiC reinforced composite through Ncuro-Gcnetic technique[J].Applied soft computing,2013,13(4):2065-2074.
[9].YAN M T , FANG C C . Application of genetic algorithm-based fuzzy logic control in wire transport system of wire-EDM machine[J]. Journal of materials processing technology, 2008,205(1/2/3):128-137.

[10] 王振华. 实用轴承手册[M]. 上海：上海科学技术文献出版社，1990.


备注/Memo

备注/Memo:

收稿日期：2020-12-14

基金项目：江苏省自然科学基金优秀青年基金项目（BK20160084）；南京市产学研后补助项目资助（201722014）
作者简介：刘 鹏（1996—），男，山东泰安人，硕士研究生，研究方向为数控技术与装备自动化控制；罗福源（1977—），男，广西桂林人，副教授，硕士研究生导师，研究方向为数控技术与装备自动化控制，通信作者。

更新日期/Last Update: 2021-04-15