[1]东立剑,袁文全,吴志会,等.超精密光刻物镜缓冲包装设计[J].机械与电子,2015,(08):6-9,17.
　DONG Lijian,YUAN Wenquan,WU Zhihui,et al.Cushioning Packaging Design of High Precision Lithography Lens[J].Machinery & Electronics,2015,(08):6-9,17.
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超精密光刻物镜缓冲包装设计
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《机械与电子》[ISSN:1001-2257/CN:52-1052/TH]

卷:
期数:
2015年08期
页码:
6-9,17
栏目:
设计与研究
出版日期:
2015-08-26

文章信息/Info

Title:
Cushioning Packaging Design of High Precision Lithography Lens
文章编号:
1001-2257(2015)08-0006-04
作者:
东立剑; 袁文全; 吴志会;  倪明阳; 张 巍
(中国科学院长春光学精密机械与物理研究所超精密中心,长春 130000)
Author(s):
DONG Lijian;  YUAN Wenquan;  WU Zhihui;  NI Mingyang ZHANG Wei
(State Key Laboratory of Applied Optic, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China)
关键词:
物镜镜组;  数值模拟;  跌落分析;  实验验证
Keywords:
lithography lens;  numerical simulation;  drop analysis;  experiment
分类号:
TH-3
文献标志码:
A
摘要:
采用数值模拟的方法开展光刻物镜镜组的跌落分析,结合数值寻优的方式,以光刻物镜所能承受的最大加速度为约束条件确定缓冲结构的尺寸参数,并通过跌落实验验证数值仿真的准确性与可靠性,进而指导超精密光刻物镜缓冲包装的参数设计。利用此方法对质量为10 kg、镜片口径为160 mm,径厚比为8.89光刻物镜镜组进行缓冲结构设计,实验结果表明,其从10 cm高度跌落后最大加速度为4.4 g,面形变化仅为0.36 nm,满足超精密光学设备的动力学指标要求。
Abstract:
In this paper, drop numerical simulations are used before conducting analysis of lithography lenses. Based on the requirement of the maximum acceleration, the cushion structure dimensions are confirmed by the optimization solution. The experimental results demonstrate the accuracy and reliability of the numerical simulation. Using this method, the cushion packaging of lithography lens is designed. The mass of the lens is 10 kg, the aperture is 160mm, the radius-thickness ratio is 8.89. The experiment results demonstrate that the maximum acceleration is 4.4g and the lens surface changes only 0.36 nm when the lens is dropped from 10 cm. The cushion packaging design meets the dynamic indicators.

参考文献/References:

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备注/Memo

备注/Memo:
收稿日期:2015-03-11
基金项目:国家重大专项02专项(2009ZX02205)
作者简介:东立剑(1987-),男,吉林长春人,硕士,研究实习员,研究方向为光机结构设计。
更新日期/Last Update: 2015-08-26